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By Hubert-Joachim Frenck, Q-Cells AG, Bitterfeld-Wolfen, Germany
ABSTRACT
Ever since the introduction of attractive feed-in tariffs for photovoltaic electricity generation, there has been a huge surge in all kinds of photovoltaic applications. Products based on multicrystalline wafers still have the largest market share with thin-film products picking up in recent times. In the course of this process, production technology for waferbased solar cells has been improved. With the second generation of tools, a trend towards standardization is apparent. Deposition of silicon nitride is one of the key processes of solar cell production. While its technological significance is often underestimated, it is the only process step that serves a multitude of purposes. In this contribution we will present aspects of the deposition of silicon nitride thin films and discuss open questions with respect to the physics of the deposition process and its implication on machine technology.
PVI-06.pdf
