SoLayTec InPassion ALD tool for depositing Al2O3 in mass production. The next generation of industrial silicon solar cells aims at efficiencies of 20% and above. To achieve this goal using ever-thinner silicon wafers, a highly effective surface passivation of the cell (front and rear) is required. Al2O3 is well known in the PV community for its excellent surface passivation properties and negative fixed charge density. The InPassion ALD tool is capable of processing up to 4,500 wph.