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Product Briefing Outline: HORIBA Jobin Yvon has
introduced the MM-16, a spectroscopic ellipsometer dedicated to the
advanced characterization of film thickness and optical constants for a
broad range of materials such as semiconductors, compounds, alloys and
organic thin films.
Problem: Spectroscopic ellipsometers allow the
accurate characterization of a range of properties including the layer
thickness, optical constants, composition, crystallinity, anisotropy,
and uniformity. Thickness determinations ranging from a few angstroms
to tens of microns are possible for single layers and complex
multilayer stacks.
Solution: The MM-16 has a
simple optical configuration using liquid crystals (LCs) as polarizer.
Each ellipsometer head contains two LC modulators, each modulator
having two possible polarisation states. The MM-16 is unique in its
ability to collect full spectral ellipsometric data at high resolution
and calculate the complete 16-element Mueller Matrix in <2 seconds.
This allows simple characterization of complex birefringent materials,
and also simplifies the investigation of samples exhibiting
depolarization effects. These unique capabilities fulfil the
requirements for standard thin film metrology as well as many emerging
applications using complex materials and structures in the display,
biotechnology, packaging and semiconductor areas.
Applications:
Characterization of thin films deposited on transparent substrates such
as those found in OLED, solar cell, or photovoltaic cells. It can also
be used for dielectric film, metals, resist and polymer
characterization.
Platform: The MM-16 is
controlled from the DeltaPsi2 integrated software package to provide
turnkey operation for a wide range of industrial and research
applications.
Availability: July 2006 onwards.
