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Advanced thermal processing equipment specialist, BTU International has said it had successfully completed a tool marathon test at a customer site for its ‘TRITAN’ HV90 dual-lane metallization firing system. The marathon test involved processing in excess of 60 million cells.
“Customers want to switch to dual-lane metallization processing to achieve in excess of 35 percent higher capital efficiency and up to 30 percent lower cost of ownership compared to single-lane processing,” remarked Bob Bouchard, product marketing manager for metallization products at BTU. “With this test completed, the HV90 has proven it can reliably deliver those benefits.”
According to BTU the dual lane system has a throughput of 3600 wafers per hour, employing its ‘TriSpeed’ technology, allowing up to 200ºC per second thermal ramp, without compromising the drying and cooling sections of the profile.
