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Meyer Burger’s subsidiary Roth & Rau and technology partner, InnoLas Systems have developed PECVD and lasers systems upgrades for PERC (Passivated Emitter and Rear Cell) solar cells that are claimed to provide a 1% gain in conversion efficiencies of mono-crystalline-based cells. Meyer Burger said that the upgrades also included both upstream and downstream process steps that have been developed and verified by key customers.
Richard Grundmüller, InnoLas Managing Director noted that the increased cell efficiencies were proven in close cooperation with end customers and verified in running production lines.
“It is crucial that we achieved this increased efficiency in industrial production lines and not only under laboratory conditions. In recent months, our technology has proven itself to be very robust and can now be integrated into existing production lines,” noted Grundmüller.
“We have integrated the two coating processes required for rear surface passivation into the tried and tested SiNA/MAiA platform,” commented Roth & Rau Head of Sales Thomas Hengst. “The modular design ensures optimum process flexibility and throughput variability, enabling the configurations to be easily adapted to existing requirements and operating costs to be cut further. The application of the AlOx and SiN cap layers increases process safety whilst maintaining the vacuum. Moreover, this eliminates the need for additional handling, giving a corresponding boost to the yield.”
Meyer Burger said that several installations employing this technology were currently in preparation for leading PV manufacturers.
