The first customer using a fully-automated ‘dry-in/dry-out’ wet processing system developed by Stangl, now part of Singulus Technologies, has accepted the system for volume production. The system is being used for wet-chemical treatment of crystalline solar wafers for anti-reflective layer deposition and was claimed to have demonstrated ‘excellent’ cell efficiencies.
Singulus said it had developed a modular, fully automated handling system for silicon wafers for the integration of wet-chemical and vacuum coating processes, which connects Stangl’s Linea machine with the equipment offered by Singulus.