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TEL and Edwards to develop PFC abatement system for dielectric film etching processes

Edwards and Tokyo Electron Limited (TEL) are to jointly develop a perfluorocarbon (PFC) gas abatement system dielectric film etching processes that will also be able to abate carbon monoxide. The ‘PA-01E’ abatement tool will also be developed with input from Adtec Plasma Technology Co., Ltd., of Japan.

“The contribution of PFC gases to global warming has been extensively documented, and we look forward to working with TEL’s engineering staff to provide an effective, low cost-of-ownership gas abatement system specifically designed to reduce the dangers of PFC pollution as a result of the semiconductor etch process,” commented Nigel Hunton, Edwards’ CEO.

The equipment is being designed to have a lower cost-of-ownership than traditional abatement technologies, focusing on a reduction in energy usage, consumables and maintenance, according to Edwards.

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Photovoltaics International 16th Edition

This sixteenth edition of Photovoltaics International marks four years of production of the quarterly journal. As always, our focus is on efficiency and quality improvement and cost reduction in manufacturing. As 2012 rolls along, companies are falling by the wayside due to supply and demand issues, ASP declines and drastic governmental subsidy cuts. A clear picture of 2012 is offered through papers from the likes of TÜV Rheinland, Fraunhofer ISE, SEMI PV Group and EPIA, amongst others.
Photovoltaics International Lite, Volume 05 - 2011

This digital interactive Lite sees Tom Cheyney follow Agua Caliente’s progress on becoming one of first truly utility-scale PV power farms, where 40–50MW (AC) will be commissioned by the end of the year. We also feature one of the world’s largest silicon thin-film PV power plants, Avenal; a report on warnings of the collapse of module prices from Solarbuzz and PI-Berlin presents tips on PV module testing. A print version of this edition will be distributed at Solar Power International 2011 in Dallas, Texas.
Manufacturing The Solar Future: The 2012 Production Annual

Manufacturing the Solar Future 2012, the second in the Photovoltaics International PV Production Annual series, delivers the next installment of in-depth technical manufacturing information on PV production processes.

TEL and Edwards to develop PFC abatement system for dielectric film etching processes

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