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TEL and Edwards to develop PFC abatement system for dielectric film etching processes

Edwards and Tokyo Electron Limited (TEL) are to jointly develop a perfluorocarbon (PFC) gas abatement system dielectric film etching processes that will also be able to abate carbon monoxide. The ‘PA-01E’ abatement tool will also be developed with input from Adtec Plasma Technology Co., Ltd., of Japan.

“The contribution of PFC gases to global warming has been extensively documented, and we look forward to working with TEL’s engineering staff to provide an effective, low cost-of-ownership gas abatement system specifically designed to reduce the dangers of PFC pollution as a result of the semiconductor etch process,” commented Nigel Hunton, Edwards’ CEO.

The equipment is being designed to have a lower cost-of-ownership than traditional abatement technologies, focusing on a reduction in energy usage, consumables and maintenance, according to Edwards.

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Photovoltaics International 14th Edition

Published in November 2011, the 14th edition of Photovoltaics International provides a variety of technical papers from some of the industry’s stalwarts. Features include: TÜV Rheinland on junction box testing; Laser Zentrum Hannover on laser edge isolation of mc-Si cells; Calisolar on the importance of traceability; Fraunhofer ISE on EWT cells; and EPIA on Europe’s LCOE.
Photovoltaics International Lite, Volume 05 - 2011

This digital interactive Lite sees Tom Cheyney follow Agua Caliente’s progress on becoming one of first truly utility-scale PV power farms, where 40–50MW (AC) will be commissioned by the end of the year. We also feature one of the world’s largest silicon thin-film PV power plants, Avenal; a report on warnings of the collapse of module prices from Solarbuzz and PI-Berlin presents tips on PV module testing. A print version of this edition will be distributed at Solar Power International 2011 in Dallas, Texas.
Manufacturing The Solar Future: The 2011 Production Annual

Manufacturing the Solar Future is the primary source guide for detailed information on the PV production process. This annual provides technical details on how the leading companies and research organizations worldwide are addressing this need by dramatically improving their manufacturing processes.

TEL and Edwards to develop PFC abatement system for dielectric film etching processes

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