Tool Order: SEMCO wins post-ion implant anneal technology order on its DF6200 platform

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PV equipment specialist SEMCO Group is to supply its latest LYTOX technology to an unidentified solar cell producer to carryout post-ion implantation damage annealing.

SEMCO said that its latest design of its DF6200 high-throughput furnace platform equipped with the LYTOX reduced pressure post-implant activation and passivation technology also included its high throughput cassette to cassette wafer transfer automation system that enables the loading of 1,400 horizontal wafers per furnace tube for high-volume production, typically N-type monocrystalline and bifacial solar cells. 

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Having recently teamed with process measurement specialist, Aurora Solar the order includes Aurora’s resistance measurement system and software. 

SEMCO noted that the customer had previously used its LYDOP-POCl3 systems, used for diffusion to realize the p-n junction and build-in voltage on solar cells.

N-type monocrystalline and bifacial solar cells are expected to gain increased acceptance by high-efficiency focused solar cell and module producers.

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