Product Briefing Outline: DuPont Performance Elastomers (DPE) has introduced ‘Kalrez’ perfluoroelastomer parts specifically designed for the photovoltaic market for both wafer-based and thin film PV processes, Kalrez parts demonstrate broad chemical compatibility and excellent thermal stability. Kalrez parts are used to improve sealing reliability in critical PV wafer processing equipment that uses plasma, high heat and aggressive chemicals.
Solution: Kalrez perfluoroelastomer parts have been field proven in highly aggressive sealing environments, like semiconductor wafer processing, for more than 30 years. Kalrez seals resist over 1800 chemicals including reactive gases and plasmas, alkalis, acids and solvents. Even in contact with these corrosive chemicals, the seals retain their elastomer properties to temperatures as high as 325°C. These products produce improved results with less downtime due to a reduction in the need for preventative maintenance (PM). Overall the perfluoroelastomer parts can have a positive impact on productivity and reduce the cost of ownership in the production environment.
Applications: Kalrez PV8030 is used for surface texturing, polysilicate removal and ‘wet’ scrubber/abatement applications. Kalrez PV8050 is used for edge isolation, ARC coating, CIS/CIGS and cadmium telluride cell layer and TCO deposition processes. Kalrez PV8070 is used for doping, metallization, and CIS/CIGS cell layer deposition processes. Kalrez 9100 is designed for amorphous/microcrystalline silicon cell layer deposition processes.
Platform: Kalrez parts have excellent thermal stability with maximum continuous service temperature up to 325°C, very low out-gassing properties, and low particle generation. DuPont Performance Elastomers also has integrated manufacturing back to the polymer, enhancing quality control and product development. Kalrez parts are manufactured in ISO 9000 registered facilities and are available in a wide variety of finished products from conventional seal shapes and bonded door seals to custom geometrics. The parts are specially cleaned and double packaged in Class 100 workstations to significantly reduce the potential for contamination. Each item is individually packaged in a bar-coded bag for full traceability. These products are available in the form of O-rings, sheets, and custom parts.
Availability: August 2008 onwards.