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New Product: PECVD coating system from SINGULUS offers high productivity on flexible platform

PECVD coating system from SINGULUS offers high productivity on flexible platform Product Briefing Outline: SINGULUS TECHNOLOGIES has developed a new solar coating machine named SINGULAR, which is used for coating of the anti-reflective and passivation layer on photovoltaic silicon cells. SINGULAR is a PECVD coating system designed as two versions for varying wafer throughput requirements.

Problem: The PV market requires fully automated and cost effective systems for coating of anti-reflective and passivation layer on photovoltaic silicon cells as lower production costs make a significant impact on the overall cost of photovoltaics.

Solution: The SINGULAR inline system employs an innovative inline concept for high output industrial production.  Advanced layer characteristics are guaranteed by high quality coatings. The new system is a fully automated system for coating of the anti-reflective and passivation layer on photovoltaic silicon cells. The essential benefit of inline technology is the transport and processing of small substrate production lots, which guarantees stable process, continuous output, flexibility and a small footprint. Every SINGULAR is autarkic to maintain productivity during maintenance of the other module(s). Additionally, uptime is high due to automatic inline chamber cleaning that does not interrupt the throughput during production. The system has its own proprietary automated handling for loading and unloading the wafers gently to minimize wafer breakage.

Applications: Coating of the anti-reflective and passivation layer on photovoltaic silicon cells

Platform: The SINGULAR is available on two basic versions. The guaranteed net capacity for an integrated is 1200 Wafer/h or 1500 Wafer/h depending of the number of installed deposition sources. Up to three SINGULAR can be installed into a production to rise up the net output capacity to over 4500 wafers/hour.

Availability: Currently available.

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