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New Product: Testbourne’s rotatable cylindrical targets offer greater utilization

14 January 2009 | By Síle Mc Mahon | Product Briefings > Thin Film

TestbourneProduct Briefing Outline: Testbourne Limited is now offering an extensive range of cast, plasma sprayed and extruded rotating cylindrical metal and ceramic sputtering targets. Rotatable targets are proving to be increasingly popular in the PV industry due to various advantages over planar sputtering targets. The most commonly used C-MAG rotary targets are available in Chromium, Silver, Aluminium-Silicon, Tin, Titanium Oxide, Stainless steel, Aluminium, Tungsten, Tantalum, Molybdenum, Niobium, Copper and Zinc alloys.

Problem: Typical utilization ratios for planar targets range from 20-40%, which presents a challenge of high production cost and short lifetime of the targets to the large area coating industry.

Solution: Rotatable targets normally contain more material and offer a greater utilization (up to 80%) in comparison to planar targets. This in turn results in much longer production runs and reduced downtime of the system. The overall benefit is an increase in the throughput of the coating equipment and lower cost of ownership. Secondly, the rotatable targets allow the use of higher power densities due to the heat build-up being spread evenly over the surface area of the target. As a consequence, an increased deposition speed can be seen along with an improved performance during reactive sputtering.

Applications: Thin-film coatings for photovoltaic solar cells, architectural glass, flat panel displays.

Platform: Testbourne Ltd. is now supplying cylindrical magnetron sputtering targets that are manufactured in many sizes, ranging from 2" up to 8.625" in diameter, with lengths from a few inches up to 160 inches. The most commonly used C-MAG rotary targets are available in Chromium, Silver, Titanium, Aluminium-Silicon, Tin, Titanium Oxide, Nickel-Vanadium and Nickel-Chrome Alloys, Stainless steel, Aluminium, Tungsten, Tantalum, Molybdenum, Indium, Indium-Tin Alloy, Niobium, Copper and Zinc alloys.

Availability: Currently available.

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