Edwards has launched the STP-iXR1606 series of magnetically-levitated turbo-molecular pumps (TMP) with a fully-integrated onboard controller. Edwards’ new TMP incorporates a new rotary design that delivers approximately 40% improvement in throughput at high gas flow rates and an increase of nearly 90% in maximum gas flow, compared to existing products.
Problem
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The reduction of energy consumption and footprint of PV manufacturing equipment and support facilities is a key focus in reducing overall cost of ownership. Providing high-uptime components reduces CoO and improves throughput and productivity.
Solution
Edwards’ new pump features a fully-integrated controller that eliminates the connection cable and rack conventionally required with a non-integrated controller. This helps reduce footprint, saving valuable fab real estate, as well as installation time and cost. In addition, the onboard controller incorporates a small power supply, which compared to existing products, delivers approximately 32% reduction in energy consumption at high gas flows. The STP-iXR1606 matches the peak pumping speed of Edwards highest performing pump in the 8-inch TMP class, but with significant improvements in throughput performance and maximum allowable gas flow. Being magnetically-levitated the TMP requires no maintenance.
Applications
Viewed as an all-in-one TMP solution for all applications, with reduced footprint, simplified installation and reduced energy costs for PV manufacturing equipment requiring vacuum functions. Specific applications may apply.
Platform
The STP-iXR1606 series delivers high reliability in dirty environments with equivalent IP54 protection against dust and humidity. It has I/O remote, RS232C, RS485 and STP-link standard communication ports, with Profibus and DeviceNet available as options.
Availability
April 2012 onwards.