Manz offers XRF-inline quality system for thin film metrology requirements

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  The fully automated X-Ray Fluorescence System has been designed to qualify various deposition process steps in photovoltaic production lines.

Manz AG has launched an XRF-Inline Quality System (IQ-XRF) as an extension of its Manz IQ Series. The fully automated X-Ray Fluorescence System has been designed to qualify various deposition process steps in photovoltaic production lines. Two of these XRF-Systems were recently integrated into a photovoltaic line and show their ability to perform in 24/7 operations.

Problem

The efficiency of a thin film solar module is mainly driven by the properties of the absorber material. Thus, one of the most critical processes in the production of thin film solar modules is the deposition of the absorber stack. It is therefore required to control this essential process step perfectly to optimize the total yield. A measurement tool which fulfills its purpose as a quality gate in mass production must guarantee a high throughput and consequently has to be fully automated.

Solution

According to these requirements Manz provides a fully automated XRF-system, which is claimed to provide outstanding accuracy and flexibility. The measurement performance is assured by ifg’s ‘Elbrus.Compact.Duo’ measurement head. Its high accuracy is mainly due to the sophisticated SD-detector, monitoring the intensity variations with a marker technology and by measuring and correction of the distance between the measurement head and substrate. The IQ-XRF is equipped with Manz’s automation and control systems, which is a proven measurement solution for qualifying thin films in various applications.

Applications

Inline thin film quality control applications such as determination of composition, measurement of thicknesses and measurement of homogeneity.

Platform

Manz Inline Quality Series: Manz IQ-XRF

Availability

Currently available