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The technology company The Linde Group offers a unique solution to replace the powerful greenhouse gas nitrogen trifluoride (NF3) used in the production of LCDs (Liquid Crystal Display) and solar panels. Based on a proven technology, the innovative process utilizes on-site generation of fluorine gas, making production more efficient and more environmentally friendly.
There is currently a high level of attention on the usage of NF3 by the electronics industry because of the gas' very high global warming impact. Linde has developed a state-of-the-art process to replace NF3 with pure fluorine, which has a zero global warming potential.
The process is applicable to the manufacturing of flat screen TVs and to the mass production of low cost, thin film photovoltaic cells, which convert sunlight into electricity. Besides fluorine's environmental advantage, it also improves performance and reduces costs in the chamber cleaning process, a critical step in the manufacturing of semiconductors, flat panels, and solar cells.
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