Angstrom Sciences targets thin film deposition with rotating cylindrical magnetron

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Product Briefing Outline: Angstrom Sciences has developed a rotating cylindrical magnetron assembly that is  compact, economical and lightweight. By utilizing the patented technology already incorporated into other ‘Onyx’-series magnetrons, Angstrom Sciences provides a 10.6° deposition profile, 85%+ target utilization and power savings up to 20% compared to conventional cylindrical magnetrons.

Problem: he traditional approach to sputtering or depositing a thin metal film uses a planar magnetron cathode. The weakness of this approach is that the usable volume of a planar is limited – a typical 5”×20”×1⁄2” planar target has a volume available for sputtering of about 50 cubic inches. The utilization of a target by a typical planar magnetron is limited to about 40%. Each time a target is exhausted, the manufacturing process must be shut down so it can be replaced, thus low usable volume and low utilization increases manufacturing downtime.

Solution: These concerns are being addressed by a new generation of rotating cylindrical magnetrons that offer significant advantages over planar magnetrons. Angstrom Sciences has developed the ‘ONYX-REVOLUTION’ with a new magnet array design to improve rotating cylindrical magnetron performance in flat panel display and web coating applications. The improved deposition profile offers reduced debris accumulation on the chamber walls, allowing for longer runtimes and higher throughput for industrial applications. The Angstrom Sciences magnet array offers a higher magnetic field intensity, which allows the sputtering process to run at lower power levels while maintaining typical deposition rates. Field-testing has verified a power savings of 20% and target utilization of 92%.

Applications: Available in 6”, 5”and 4” diameters, is designed for in-line systems and is compatible with both horizontal and vertical applications.
 
Platform: An optimized electrical transfer design to deliver high power while avoiding arcing as well as reduced brush wear and debris.

Availability: Currently available.

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