Product Reviews

Product Briefing Outline: Advanced Energy Industrieshas introduced its latest power platform: the ‘Paramount’ RF-powerdelivery system. A key aspect of the new platform is power-deliveryaccuracy and control for increasingly complex film stacks and finefeature sizes. The 3kW Paramount system is well suited for both etchand deposition processes in semiconductor, FPD, MEMS and solarphotovoltaic manufacturing.

Product Briefing Outline: HORIBA Jobin Yvon hasintroduced the MM-16, a spectroscopic ellipsometer dedicated to theadvanced characterization of film thickness and optical constants for abroad range of materials such as semiconductors, compounds, alloys andorganic thin films.