Product Briefing Outline: Oerlikon Leybold Vacuum has launched DRYVAC, a new range of dry vacuum pumps. Incorporating many large and small design innovations, all models in the DRYVAC platform have been designed and adapted to the special needs of processes in the photovoltaic production chain, including coating applications and various industrial manufacturing processes.
Problem: Vacuum pumps are used in a wide variety of processing applications within c-Si and thin-film production. Low energy consumption is becoming increasingly important to lowering the overall cost of ownership. However, small and flexible combinations with high system uptimes are also required as processes evolve and change.
Solution: DRYVAC Sprinter and Enduro versions have optimized pumping speeds at all pressure ranges from 10-2 mbar up to atmosphere, which means they are ideal for fast pumpdown times and specially suited for load lock applications. DRYVAC Enduro pumps are said to cover all typical features needed for process industry applications. Models from the DRYVAC Champion range have been designed to provide the highest reliability in harsh process duties. These pumps are optimized for handling typical gases from the production process in the photovoltaic and flat panel display industry. The DRYVAC range comprises the following models: DRYVAC 650 S; DRYVAC 650 S-i; DRYVAC 5000 RS-I; plus multiple system combinations with roots blowers from the RUVAC series.
Applications: Wide-range of c-Si and thin-film manufacturing process applications.
Platform: DRYVAC pump systems and “-i” versions include housing, castors, frequency converter, PLC and touch screen display as standard. Control and monitoring can be visualized via intuitive menu navigation, software and field bus.
Availability: Currently available.