Fraunhofer Institut für Solare Energiesysteme (Fraunhofer ISE) has
placed an order with AIXTRON for its 300mm Close Coupled Showerhead
CRIUS epitaxy reactor that will be used for the research and
development of GaAs-based multi-junction solar cells on silicon.
“Within the scope of the BMBF project “III-V-Si” we will receive AIXTRON’s Close Coupled Showerhead system,” said Dr. Frank Dimroth, head of the III-V-Epitaxy and Solar Cells group. “Fraunhofer ISE operates an AIX 2600G3 Planetary Reactor for more than 10 years and has achieved excellent results on this tool. Now we would like to start a second development pathway focussing on single large wafer processes on Si. We have been working with AIXTRON and closely monitored the evolution of growth technology for the preparation of compound semiconductor thin films on silicon wafers. This is a challenging task but we are confident that the CRIUS tool will meet our requirements of low memory effect, high uniformity and throughput with the requisite economics for solar cell production.”