Product Briefing Outline: Op-tection has introduced an advanced new technology family for the measurement of SiNx anti-reflection coating for c-Si solar wafers. The ‘OSIS Coating’ system enables 100% inline measurement of the refractive index and thickness distribution on textured production wafers, for consistent and high efficient wafer production. Its offline counterpart delivers detailed coating data of the complete surface topography at over 100,000 points within just a minute.
Problem: A highly stable silicon nitride deposition process is paramount for high cell efficiency as well as the consistent cosmetic appearance of the solar cells within modules. 100% inline measurement of the SiNx thickness and refractive index provides engineers with essential capabilities to achieve the maximum out of the coater and deposition process.
Solution: Inline measurement directly on textured wafers helps to avoid preparation of special polished wafers. Apart from lower labor expenses, measuring directly on the real production wafers has an additional benefit: the indirect correlation between the measurement on polished reference wafers and the actual textured production wafers becomes obsolete. Higher line up-time is another important capability that is obtained. Access to thickness and refractive index trends of every produced wafer will enable the optimum use of plasma or sputtering targets. After periodic coater cleaning and maintenance it is possible to return to the process window more quickly as the required control readings are available directly after the first coated wafer. On an annual basis, this time gain will allow you to produce considerably more wafers. More A-grade cells are the result of smaller process deviations, which subsequently cause consistent efficiency and equal cosmetic solar cell appearance.
Applications: Measurement directly on textured wafers.
Platform: The stand-alone version of OSIS Coating is designed to complement its inline counterpart. Production wafers that need further investigation after the deposition process, are measured precisely and fast. Equally important, OSIS Coating enables you to research coating behavior in more detail within just a fraction of the time compared to conventional metrology tools. In Fast Scan Mode, OSIS Coating provides a meaningful distribution map of 100×100 thickness measurements and 100 refractive index measurements in less than 10 seconds.
Availability: Currently available.