Product Briefing: With the acquisition of Tecnofimes, Roth & Rau has collaborated with the subsidiary to develop a new firing furnace, dubbed CAMiNI. The system is characterized by high efficiency at low operating costs. The initially offered model with 2 lanes (6” wafers) provides the basis for an extension, which facilitates the firing of solar cell contacts onto up to three lanes at the same time. The throughput of the CAMiNI is indicated with ≥ 6,000 wafers/h. Roth & Rau has already received its first purchase orders for the system.
Problem: Metal belt transportation in firing furnaces may introduce metallic contamination into the wafers.
Solution: The transport rolls, in comparison to former machines are made of ceramics, which prevent metallic contamination of the wafers. Furthermore, the firing furnace, needs less space than comparable earlier systems and facilitates easier handling at lower operating costs.
Applications: Fast firing application with ramp rates up to 180 K/s and cooling rates of about 150 K/s.
Platform: The new CAMiNI is a compact system with the following dimensions: 4,554 x 1,766 x 2,200 mm. It is equipped with five heating zones and 44 lamps. The Uptime for the new CAMiNI is expected to be 94% and higher. The temperature uniformity is measured by TC and is ± 2K. The conveyors can reach speeds of up to 11 m per minute, attaining a maximum temperature of 1050 °C. This firing furnace does not require water cooling and the power consumption of a typical firing process is about 15kW.
Availability: Currently available.