Oerlikon Leybold Vacuum’s magnetically levitated turbo molecular pumps offer full system integration

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Oerlikon Leybold Vacuum has launched a new magnetically levitated turbo molecular pump series that offers full system integration of all components, saving costs and space for manufacturing processes within coating and industrial applications in the rough, medium, high and ultra-high vacuum regimes. The Magintegra pumps are resistant against process particles and deposits. For research and development purposes and pilot production, the Univex line of universal experimentation PVD vacuum coating systems are available in a wide range of standard and multi-purpose configurations.

Problem

Today, full system integration of all components is one of the most important requirements for the design and operation of a vacuum system posed by engineers in industry, R&D and analytical business fields, avoiding complicated piping and superfluous cabling.

Solution

The new, magnetically levitated turbo molecular pumps Turbovac Magintegra from Oerlikon Leybold Vacuum can do without the space usually needed for a separate frequency converter and provide a compact, flexible design, excellent vacuum performance, and a standardized program of accessories. These offer maintenance-free operations in most industrial processes, such as display-, solar-, coating-, and R&D applications. The Magintegra pumps are resistant against process particles and deposits. Process-induced shock venting is tolerated to a high degree as well as assembly in any position and angle. The rotationally symmetrical and space saving housing is combined with a frequency converter which can be mounted flexibly as well.

Applications

Research and development purposes and pilot production.

Platform

The use of 5-axis magnetically levitated bearings means the pump requires little maintenance and shows a high degree of safety against hydrocarbons, especially when even low contamination of remaining bearing lubricants or greases are not compatible with sensitive manufacturing processes. Magintegra pumps also operate at extremely low vibration levels which are of high importance in some applications. The pumps are offered with communication interfaces and an intelligent monitoring of pump parameters, including self-protection functions in case of operational disturbances.

Availability

April 2011 onwards.
 

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