Designed for diamond wire cut and slurry cut monocrystalline, quasimono and multicrystalline wafers, SCHMID's ‘Metrology Sorter’ with ‘Analyzer Software’ option takes final inspection into the realm of critical process inspection. SCHMID’s analyzer software compiles the measurement data of the finished wafers in a three dimensional brick, which establishes the basic information for the specific intervention in the upstream production steps.
A key factor in the long process of crystallization and cutting of solar wafers is the prompt recognition of the effects on the wafer quality, especially to identify the origin of different defects such as µCracks or chipping and to control the causally related processes.
The Metrology Sorter System is a user-friendly ‘on-the-fly’ final inspection system that when used with its optional analyzer software collates the measurement data of the finished wafers in a three dimensional brick. The visual display of the surface roughness distribution on a wafer as well as the distribution on all the wafers in the entire brick allows important conclusions to be drawn about the cutting parameters. The optical preparation of a multitude of measurement data is therefore always clearly arranged and the software operation proves to be intuitive. From the measurement results the four parameters thickness, TTV, roughness and waviness are calculated and visually displayed. No mechanical back-fitting is necessary when switching between wafer types.
Designed for diamond wire cut and slurry cut wafers as well as for monocrystalline, quasimono and multicrystalline wafers. Every wafer is scanned the entire length by 3 lasers on the upper and lower side.
SCHMID offers complete turnkey solutions for the entire wafer production process from crystal growing to inspection and sorting. The Metrology Sorter is the on-the-fly inspection in the SCHMID Wafer Backend, which also includes upstream machines like Precleaning + Degluing, Singulation and Horizontal Wafer Cleaning and the necessary handling machines and covers all processes after the cutting with SCHMID's own equipment.