A major Taiwan-based solar cell producer has placed an ALD (Atomic Layer Deposition) system previously used for evaluation work from Netherlands-based Levitech into manufacturing, while placing a second system on order.
The Levitrack ALD system is used for aluminum oxide (Al2O3) passivation applications and moves wafers on a fast, linear track with the wafers floating on and blanket of gas passing through dedicated stages for successive deposition and annealing, which uses conductive heating technology.
“The Levitrack has a proven record in high volume manufacturing and our customer was satisfied with the excellent performance” said Jaap Beijersbergen, CEO of Levitech. “They decided to order a second system for their expansion for the production of high-efficiency crystalline solar cells. This system will be used for PERC cells – with efficiencies exceeding 20% – , as well as multi-crystalline and n-type products.”
The company had previously announced in July, 2013 that it had delivered its fourth Levitrack system to a customer in Asia.
“This client chose our Levitrack ALD system based on its significant productivity, cost-of-ownership and process advantages over competitive PECVD and ALD systems for aluminum oxide (Al2O3) applications,” added Beijersbergen.
Levitech said that the second tool would be shipped to the customer in Taiwan in the second quarter of 2014.
The company is a spin-off from semiconductor equipment supplier ASM International, and was established in 2009 to initially market ASM’s RTP (Rapid Thermal Processing) technology using the floating wafer and conductive heating techniques.
Late last year, screen printer specialist, DEK Solar was acquired by ASM Pacific Technology (ASMPT), itself a part of ASM International.