ULVAC Technologies has introduced the UNECS-2000 spectroscopic ellipsometer for the high speed measurement of film thickness and optical constants of thin films in R&D applications.
Spectroscopic ellipsometers can analyze multi-layer films or other complexly structured thin films because they can measure the polarized light condition of thin films in certain wavelength bands. There are two categories of measurement methods: the optical device rotation method and the phase modulation method. The former method controls the polarization properties by mechanically rotating optical devices. The latter method controls the polarization properties of the polarization device electrically. These methods require either mechanical or electrical control of complex optical systems. This is why developing more compact and faster ellipsometers has been difficult.
The compact UNECS-2000 spectroscopic ellipsometer eliminates the need for conventional methods that mechanically or electrically control polarization devices. It takes advantage of the spectrums obtained from the polarization interference occurring between two high-order phase shifters to instantaneously capture the wavelength distribution of the sample's spectroscopic polarization parameters. The emitter and sensor heads are small with built-in light source and controller. It comes with the computer control and analysis software. The motor stage can handle samples up to 200 mm in diameter. Using parallel measurement, the thickness of up to six individual film layers are measurable at the same time.
Transparent or semi-transparent films on the substrates up to φ200mm (Oxide film, nitride film, photo resist film, ITO etc.)
UNECS-2000 is based on the Spectroscopic ellipsometry by utilizing the high-order retarders. Designed for high-speed in a compact size, its motorized stage can measure the sample up to the size of 200mm.