Applied Materials’ Varian VIISta ion implant platform will be using Praxair Electronics’ UpTime sub-atmospheric dopant gas delivery system. Praxair Electronics noted that it is also the preferred sub-atmospheric dopant supplier for the Solion implant tool developed by Varian Semiconductor Equipment.
“We are pleased to offer customers Praxair’s UpTime system on our VIISta platform,” said Matt Gaucher, general manager of high current implantation at Varian Semiconductor Equipment, a division of Applied Materials. “Compared to other available options, the UpTime system has demonstrated significantly improved operational productivity on our platform.”
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