For extremely high product quality and productivity for treatment of silicon bricks, Arnold Group has introduced the type 72/865 machine, which is a high-end combination of a surface and chamfering machine. Arnold claims that it now has a balanced production range in the grinding field with this high-end grinding machine which can serve the most different requests of customers. The improvements and further developments of this high-end grinding machine, 72/865, are also integrated in the surface grinding machine 72/860 and chamfering machine 72/852. Furthermore they influence the combination machine, now available as 72/855.
Problem
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Optimal yield for ingots and wafers is a key metric for cost reduction strategies. Reduction in material loss and material usage such as water consumption is required.
Solution
The new high-efficient grinding machine with four parallely mounted grinding aggregates is suitable for grinding of lateral surfaces and for chamfering of squared silicon workpieces in the formats of 125 x 125 millimeters and 156 x 156 millimeters with an automatic format change. The extremely sturdy machine construction guarantees an excellent machine angularity and an extremely high absorption. The machine processing parts are casted with mineral composite. A new development, the cooling water guidance with a pressure of up to 25 bar, is claimed to guarantee a balanced process cooling and hence reduces the water consumption by nearly one third. This high-end grinding machine is claimed to pave the way to ‘Zero Error’ strategies demanded by the wafer manufacturers. A process capability of >1,67 Cpk at a tolerance of +/-0,05 millimeters on a permanent basis is claimed.
Applications
Silicon ingot grinding requirements.
Platform: Current production and process data are stored, visualized and analyzed with the Arnold remote process analysis tool Arpat and are the basis for the continuous optimization of production and process parameters. The software tool Arpat, developed by Arnold, is a data base and controllable via Web-Browser and is an available option for all Arnold machines.
Availability
September 2011 onwards.