Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

December 1, 2011
Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Try Premium for just $1

  • Full premium access for the first month at only $1
  • Converts to an annual rate after 30 days unless cancelled
  • Cancel anytime during the trial period

Premium Benefits

  • Expert industry analysis and interviews
  • Digital access to PV Tech Power journal
  • Exclusive event discounts

Or get the full Premium subscription right away

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

December 5, 2025
BayWa r.e. has sold two of its UK solar farms, which have a combined capacity of 89.9MW, to global asset management firm Capital Dynamics
December 5, 2025
Origis Energy has raised US$265 million in finance from Advantage Capital to support the development of a 305MW solar PV portfolio in the US.
December 5, 2025
WBS Power has sold the 150MW solar, 500MW/2,000MWh BESS Project Jupiter in Brandenburg, Germany, to investor Prime Capital.
December 5, 2025
Over 140 US solar companies have urged Congress to reconsider changes to permitting which they say have resulted in “a nearly complete moratorium” on solar project permits.
Premium
December 5, 2025
In November, the Colorado PUC ordered utility Xcel Energy to provide higher-quality information, and introduce flexible tariffs.
December 4, 2025
High power prices and increased energy storage usage have led to a sharp increase in self-consumption of solar power in Germany since 2022, according to data from the Fraunhofer Institute for Solar Energy Systems (ISE).

Upcoming Events

Upcoming Webinars
December 17, 2025
2pm GMT / 3pm CET
Solar Media Events
February 3, 2026
London, UK
Solar Media Events
March 24, 2026
Dallas, Texas
Solar Media Events
April 15, 2026
Milan, Italy
Solar Media Events
June 16, 2026
Napa, USA