Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

December 1, 2011
Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Try Premium for just $1

  • Full premium access for the first month at only $1
  • Converts to an annual rate after 30 days unless cancelled
  • Cancel anytime during the trial period

Premium Benefits

  • Expert industry analysis and interviews
  • Digital access to PV Tech Power journal
  • Exclusive event discounts

Or get the full Premium subscription right away

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

October 31, 2025
US thin-film module manufacturer First Solar has unveiled plans to build a new 3.7GW manufacturing plant in the US in 2026.
October 31, 2025
Australia's solar and energy storage sectors delivered transformative performance during the third quarter of 2025, with grid-scale solar generation reaching 1,699MW average output while battery systems expanded capacity by 2,936MW since Q3 2024.
October 31, 2025
Acen Australia has committed to recycling around one million solar modules from its 400MW Stubbo solar PV power plant in New South Wales.
October 30, 2025
Scatec posted development and construction (D&C) revenues of NOK1,760 million (US$175.1 million) in the third quarter of this year.
October 30, 2025
Global net zero by 2050 is now “impossible” and the world is on course for temperature rises of 2.6°C, according to energy market analyst Wood Mackenzie.
October 30, 2025
US microinverter producer Enphase Energy posted increased revenues, margin and income in Q3 2025, as it doubles down on its US manufacturing operations.

Subscribe to Newsletter

Upcoming Events

Upcoming Webinars
November 12, 2025
10am PST / 1pm EST
Solar Media Events
November 25, 2025
Warsaw, Poland
Solar Media Events
December 2, 2025
Málaga, Spain
Solar Media Events
February 3, 2026
London, UK
Solar Media Events
March 10, 2026
Frankfurt, Germany