Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

December 1, 2011
Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Try Premium for just $1

  • Full premium access for the first month at only $1
  • Converts to an annual rate after 30 days unless cancelled
  • Cancel anytime during the trial period

Premium Benefits

  • Expert industry analysis and interviews
  • Digital access to PV Tech Power journal
  • Exclusive event discounts

Or get the full Premium subscription right away

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

January 8, 2026
ENGIE and Ampion added new solar capacity, Reactivate plans to build on landfill sites and Pivot has completed the first phase of a portfolio.
January 8, 2026
US renewables developer Adapture Renewables has secured US$233 million in tax equity from US Bank to support its 441MW Titanium solar PV project portfolio.
January 8, 2026
Curtailment of solar PV and wind has continued to increase in Chile last year and passed 6TWh, up 8% year-on-year, according to trade body, the Chilean renewable energy and energy storage association (ACERA).
January 8, 2026
Solar manufacturing major Canadian Solar is looking to raise US$200 million in convertible senior note sales to support its US manufacturing operations
January 8, 2026
Renewables developer Pacific Hydro has started commercial operations at its 293MW/220MWh solar-plus-storage project in Chile.
January 8, 2026
SunPower and the REC Group have unveiled a new 470W solar panel, dubbed 'Monolith', which is designed for use in the US residential sector.

Upcoming Events

Solar Media Events
February 3, 2026
London, UK
Solar Media Events
March 24, 2026
Dallas, Texas
Solar Media Events
April 15, 2026
Milan, Italy
Solar Media Events
June 16, 2026
Napa, USA
Solar Media Events
November 24, 2026
Warsaw, Poland