Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

December 1, 2011
Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Try Premium for just $1

  • Full premium access for the first month at only $1
  • Converts to an annual rate after 30 days unless cancelled
  • Cancel anytime during the trial period

Premium Benefits

  • Expert industry analysis and interviews
  • Digital access to PV Tech Power journal
  • Exclusive event discounts

Or get the full Premium subscription right away

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

Premium
March 17, 2026
PV Talk: Premier Energies' Vinay Rustagi explores how India’s rapid renewable energy expansion is colliding with the limitations of its grids.
March 17, 2026
Sunsure has secured INR6.06 billion (US$65.6 million) in debt financing to develop solar projects across Maharashtra and Uttar Pradesh.
March 17, 2026
US corporate clean energy procurement hit a record high in 2025, growing by 12% with the majority of deals for solar PV capacity, according to the Clean Energy Buyers Association (CEBA).
March 17, 2026
IPP rPlus Energies has secured over US$650 million in debt facilities to support construction work at its Blacks Creek Energy Centre in Idaho.
March 17, 2026
Japanese-owned renewables firm Idemitsu Renewables has begun operations at a utility-scale solar-plus-storage project in California.
March 17, 2026
The Moroccan Agency for Sustainable Energy (MASEN) has started construction on the 305MW Noor Atlas solar PV portfolio.

Upcoming Events

Solar Media Events
March 24, 2026
Dallas, Texas
Solar Media Events
April 15, 2026
Milan, Italy
Solar Media Events
June 16, 2026
Napa, USA
Solar Media Events
October 13, 2026
San Francisco Bay Area, USA
Solar Media Events
November 3, 2026
Málaga, Spain