Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

December 1, 2011
Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Try Premium for just $1

  • Full premium access for the first month at only $1
  • Converts to an annual rate after 30 days unless cancelled
  • Cancel anytime during the trial period

Premium Benefits

  • Expert industry analysis and interviews
  • Digital access to PV Tech Power journal
  • Exclusive event discounts

Or get the full Premium subscription right away

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

February 2, 2026
Independent power producer (IPP) TerraForm Power has acquired a 1.56GW solar project in Lee County, Illinois from Hexagon Energy.
February 2, 2026
Private equity firm Younan Company has launched an 880MW solar-plus-storage project in California, marking its entry into utility-scale solar PV in the US.
February 2, 2026
The price of solar PPAs signed in North America increased 3.2% between the third and fourth quarters of 2025, reaching a high of US$61.67/MWh.
February 2, 2026
The rate of installation of new self-consumption PV systems in Spain fell slightly last year, according to data from trade body the Spanish Photovoltaic Union (UNEF).
February 2, 2026
India’s Union Budget 2026-27 reinforces government support for renewables through duty exemptions and infrastructure spending.
Premium
February 2, 2026
PV Tech Premium explores the impacts that the EU's revised cybersecurity review will have on the continent's solar industry.

Upcoming Events

Solar Media Events
February 3, 2026
London, UK
Upcoming Webinars
February 18, 2026
9am PST / 5pm GMT
Solar Media Events
March 24, 2026
Dallas, Texas
Solar Media Events
April 15, 2026
Milan, Italy
Solar Media Events
June 16, 2026
Napa, USA