By Kevin Reddig, Team Leader, Fraunhofer IPA
The aim of this paper is to provide an overview of the methods of automation and their application areas. Current technologies and their applications in both crystalline and thin-film technology will be the main focus, with detailing of the value chain, starting from the feedstock to the finished product. For ease of discussion, the focus is on the part of the value chain where discrete manufacturing on the substrates takes place: for thin film, the feed-in of substrates into the line, and for crystalline technologies, the focus is on wafer manufacturing.