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TCAD in the semiconductor industry and its advantages for solar cell manufacturing

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By Nick E.B. Cowern, School of Electrical, Electronic and Computer Engineering, University of Newcastle-upon-Tyne,; Chihak Ahn, School of Electrical, Electronic and Computer Engineering, University of Newcastle-upon-Tyne,

Technology computer-aided design (TCAD) is pervasive throughout research, development and manufacturing in the semiconductor industry. It allows very low-cost evaluation of process options and competing technologies, guides process development and transfer to production and supports more efficient process improvement with minimal down time in the factory environment. This paper reviews the use of TCAD in the semiconductor industry and shows, with some illustrative examples, its important enabling role for the PV industry.

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The 12th Edition was published in May 2011. Highlights from this edition include Conergy’s in-depth study of MES in PV facilities; University of Konstanz heralds the return of UMG-Si; RWTH Aachen University details the gettering options available for selective emitters; TU Delft presents an overview of breakage issues for silicon wafers and cells; and the University of Toledo outlines the benefits of RTSE in polarized light metroscopy.

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