Tool Order: Solsonica selects gas abatement technology from Edwards


Photovoltaic cell and module manufacturer Solsonica, based in Rieti, Italy has selected gas abatement technology from Edwards that will be used for abatement during silicon nitride (SiN) deposition in its polysilicon solar cell manufacturing operations. Solsonica has purchased two ‘ATLAS’ thermal conditioning systems (TCS) for its requirements.

“To successfully meet the growing global demand for alternative energy sources, future generations of solar energy products will have to be manufactured using the same high-volume processes used today in the semiconductor industry,” said Enzo D’Antonio, Chairman of Solsonica. “Edwards’ established expertise in gas abatement applications in the semiconductor market made it a logical choice for our gas abatement technology needs.  In addition, it already has a fully trained service support team in the region to help us ramp to production in the most quick and effective way.”

“This sale to Solsonica highlights the benefits Edwards offers to customers in the solar industry,” said Sia Abbaszadeh, Business Head, Solar & Flat Panel Display, Edwards. “We are unique in our ability to provide them with an extensive range of innovative vacuum and abatement technologies that help reduce manufacturing costs, while also helping to meet even the most stringent factory emission requirements.”

Edwards’ ATLAS TCS abates all hydrides and gives sub-TLV removal of acid gases, while minimizing NOx, products of incomplete combustion and hazardous air pollutants (HAPs). The technology is suitable for all CVD processes where effective powder handling and HAP abatement is needed.

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