ACI-ecotec’s ‘ecoCarrier’ system is used in raw wafer and solar cell manufacturing processes (after ingot cutting, cleaning stations / lines, texture etching, etc.). Through its special patented design, the carrier is chemically resistant and dimensionally stable for utilization in wet chemical processing whereby being exposed to varying chemical concentrations and rapid temperature changes still hold its form.
Problem
According to ACI-ecotec, other carriers tend to deform or lose shape when exposed to extreme temperatures and fluctuations endured by most all chemical batch processes, thereby rendering the wafer slots basically useless for automated handling. Chemical agents and solutions tend to corrode other carriers and within a short time cause cracks and rips that quickly damage carrier material, often after 2 simple uses.
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Solution
The ecoCarrier’s special design features prevent liquid chemicals from adhering to the carrier thus evading chemical cross-contamination and no dead-spots. The drying properties also prevent chemical build-up on the wafer within the carrier (boat-marks). All 6 static bars as well as the removable retaining bar have high-precision toothed profiles facing each other for automatic loading of the wafers as well as perfect parallel wafer separation for drying and protection during transport. All bars feature a hermetically sealed, thus chemically 100% resistant steel core which increases the carrier’s stability and weight in order to prevent deformation and buoying of the whole carrier during wet processing with gaseous reactions. An additional removable retaining bar is used to prevent the wafers from floating during wet processing, from falling out during transport and handling as well as for general protection of the delicate wafers. The retaining bar has eccentrically formed axes for safe tool- and error-free locking.
Applications
Raw wafer and solar cell manufacturing processes (after ingot cutting, cleaning stations / lines, texture etching, etc Loading and unloading: Wet chemical texture and cleaning. Batch diffusion and in-line PSG etching and edge isolation.
Platform
The ecoCarrier consists of 2 lateral base plates and 6 specially reinforced compound bars, the whole assembly being welded for hermetical sealing, chemical impermeability, and corrosion resistance and for major protection of the customer’s processes against cross-contamination. RFID-ready through optional integration of transponders for traceability, process tracking
Availability
Currently available with standard production items delivery within 6-8 weeks. Customized production on request.