MV Products is introducing a line of vacuum foreline traps for manufacturing processes that create large volumes of solid byproducts such as those used for producing solar cells, HB-LEDs, and Li-ion batteries.
Vacuum pump lifetimes can be impacted by byproducts used for deposition processing, raising manufacturing costs and disrupting production due to forced downtime for repair or replacement.
Featuring user-selectable filter elements, MV Vacuum Inlet Traps include the ‘MV Multi-Trap’ which has a knock-down stage plus two stages of filter elements and is capable of up to 2,500 cu. in. of solids accumulation, and the ‘Posi-Trap’ for applications up to 50 CFM. Both are offered in several sizes with stainless steel, copper gauze, molecular sieve, activated charcoal, pleated polypropylene (2-, 5- and 20 µm pore sizes), and ‘Sodasorb’ filters.
Suited for MOCVD, HVPE, PECVD, or LPCVD processes used in manufacturing solar cells, HB-LEDs, and Li-Ion batteries which generate high volumes of particulates.
Offered in several models to accommodate different manufacturing process applications and volume requirements, they can incorporate a wide range of filters for trapping solids, organic solvents, and other contaminants and protecting vacuum pump systems from oil back streaming.