Product Briefing Outline: DuPont Performance Polymers (DuPont) have introduced ‘Zalak’ 5300 high-performance seals for photovoltaic cell manufacturing. Zalak 5300 seals bridge the performance gap between standard fluoroelastomers (FKM) and perfluoroelastomers (FFKM) seals. The seals are specially formulated for use in plasma environments, such as edge isolation, ARC coating in crystalline cell manufacturing, TCO sputtering deposition, and selective a-Si PECVD applications in PV cell manufacturing.
Problem: As PV manufacturers use more aggressive and efficient chemicals, such as nitrogen trifluoride (NF3), and oxygen (O2) plasma to increase uptime and improve output, more strain is placed on the manufacturing process. Materials traditionally used in PV manufacturing, like silicone, fluorosilicone, and standard fluoroelastomers can degrade quickly in harsh conditions causing unplanned maintenance due to incompatible sealing materials.
Solution: Zalak seals have been designed as a cost-effective alternative in select applications where traditional sealing materials are insufficient. In addition to its plasma resistance, the seals offer good resistance to ‘dry’ process chemistry, as well as excellent compression set properties. They also feature low stiction and very low particle generation. For static and low-sealing force applications, like chamber lid seals and gas inlet seals. Zalak 5300 seals are seen as an upgrade from standard sealing materials.
Applications: Specially formulated for use in plasma environments.A maximum continuous service temperature of 200 °C is suggested.
Platform: Zalak 5300 high performance seals join the Kalrez perfluoroelastomer product line as a cost-effective alternative in select applications where traditional sealing materials are insufficient. It bridges the performance gap between standard fluoroelastomers (FKM) and perfluoroelastomers (FFKM) parts. Contact DuPont for the availability of sealing shapes or sizes.
Availability: July 2010 onwards.