Semiconductor equipment supplier Novellus Systems developing ALD process for solar cells

Facebook
Twitter
LinkedIn
Reddit
Email

Semiconductor equipment supplier, Novellus Systems, is developing what it describes as conformal film deposition (CFD) technology; an atomic layer deposition process to grow conformal metal oxide and metal nitride dipole layers in the PV cells. Collaboration is being undertaken with the University of South Florida (USF), to study the precise engineering of solar cell interfaces via a National Science Foundation (NSF) grant.

Novellus's CFD films are deposited using a new version of its ‘VECTOR’ PECVD (plasma enhanced chemical vapor deposition) system, used extensively in semiconductor manufacturing.

This article requires Premium SubscriptionBasic (FREE) Subscription

Unlock unlimited access for 12 whole months of distinctive global analysis

Photovoltaics International is now included.

  • Regular insight and analysis of the industry’s biggest developments
  • In-depth interviews with the industry’s leading figures
  • Unlimited digital access to the PV Tech Power journal catalogue
  • Unlimited digital access to the Photovoltaics International journal catalogue
  • Access to more than 1,000 technical papers
  • Discounts on Solar Media’s portfolio of events, in-person and virtual

Or continue reading this article for free

“The global focus and investment in emerging green technologies has necessitated the need for new fabrication techniques to make these alternative energy sources commercially viable,” noted Sesha Varadarajan, senior vice president of Novellus's PECVD business unit. “We believe, as do our partners at the University of South Florida, that conformal film deposition will be critical in building more efficient photovoltaic solar cells. As a company, this grant typifies our commitment to work with leading universities to come up with commercial solutions with a strong basis in science.”

Novellus said that growing conformal metal oxide and metal nitride dipole layers several atoms thick could enable band alignment for optimized charge transfer or blocking that enable improved photocurrent and voltage control within the cell.

Conventional ALD processes are inherently slow and not conducive to high-volume, low-cost PV manufacturing. Several companies are developing faster ALD techniques though this is the first time a major semiconductor equipment supplier is also developing the technology.

Novellus is well known for high productivity tools within the semiconductor industry. Interestingly, soon after rival, Applied Materials entered the PV equipment market, Rick Hill, Novellus’s CEO squashed all talk of the company ever following Applied into the PV sector.
 

Read Next

July 4, 2025
Chinese PV provider Skycorp Solar Group has announced a solar plant acquisition and development strategy following unanimous board approval.
July 4, 2025
Germany’s latest innovation tender has awarded 488MW of co-located capacity, with all the projects being solar PV tied with energy storage.
July 4, 2025
Risen Energy’s mass-produced heterojunction (HJT) modules have reached a cell conversion efficiency of 26.61%, a record figure for the company.
July 4, 2025
The US House of Representatives has passed the final version of the reconciliation bill that is now going to US President Donald Trump’s desk for his signature before its passing.
July 4, 2025
Australian retailer AGL Energy has confirmed its acquisition of South Australia’s Virtual Power Plant (SAVPP) from Tesla.
July 3, 2025
Renewable energy curtailment in Brazil is set to reach 8% across the country, and be as high as 11% in the north-east, by 2035.

Subscribe to Newsletter

Upcoming Events

Media Partners, Solar Media Events
September 2, 2025
Mexico City, Mexico
Solar Media Events
September 16, 2025
Athens, Greece
Solar Media Events
September 22, 2025
Bilbao, Spain
Solar Media Events
September 30, 2025
Seattle, USA
Solar Media Events
October 1, 2025
London, UK