Edwards has expanded its iXA family of magnetically-levitated turbomolecular pumps with the introduction of the STP-iXA2206 and STP-iXA3306 pumps. Developed for solar, glass coating, semiconductor and LCD etch applications, the iXA2206/iXA3306 pumps offer performance superior to that offered by earlier iXA family pumps.
Problem
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The STP-iXA2206 offers the same pumping speed of the earlier STP-A2203, yet the maximum throughput capability has been increased. The integration of the onboard controller eliminates the need for control unit rack mounting and a connection cable between the pump and the control unit, saving installation time, space and cost. Its compact design and size compatibility with previous models simplifies upgrades from existing pumps
Solution
The new STP-iXA2206/iXA3306 are fully-integrated vacuum pumps that are claimed to be easy to install and offer a small footprint. It features the latest-generation small power supply, which has been incorporated into the onboard controller first introduced with the STP-iXA2205 pump. It also includes a temperature management system option to minimize the formation of process-generated byproducts. The pump’s five-axis magnetic bearing system and new motor and drive system ensure long life and low operating costs with maintenance intervals as long as five years.
Applications
Fully-integrated vacuum pumps for Etch requirements.
Platform
The STP-iXA3306 offers industry-leading pumping performance. It has a maximum pumping speed of 3200 liters per second and improved throughput performance at high gas flows.
Availability
December 2010 onwards.
