Edwards improves performance and longevity of integrated etch tool pumps

Facebook
Twitter
LinkedIn
Reddit
Email

Edwards has expanded its iXA family of magnetically-levitated turbomolecular pumps with the introduction of the STP-iXA2206 and STP-iXA3306 pumps. Developed for solar, glass coating, semiconductor and LCD etch applications, the iXA2206/iXA3306 pumps offer performance superior to that offered by earlier iXA family pumps.

Problem

This article requires Premium SubscriptionBasic (FREE) Subscription

Unlock unlimited access for 12 whole months of distinctive global analysis

Photovoltaics International is now included.

  • Regular insight and analysis of the industry’s biggest developments
  • In-depth interviews with the industry’s leading figures
  • Unlimited digital access to the PV Tech Power journal catalogue
  • Unlimited digital access to the Photovoltaics International journal catalogue
  • Access to more than 1,000 technical papers
  • Discounts on Solar Media’s portfolio of events, in-person and virtual

Or continue reading this article for free

The STP-iXA2206 offers the same pumping speed of the earlier STP-A2203, yet the maximum throughput capability has been increased. The integration of the onboard controller eliminates the need for control unit rack mounting and a connection cable between the pump and the control unit, saving installation time, space and cost. Its compact design and size compatibility with previous models simplifies upgrades from existing pumps

Solution

The new STP-iXA2206/iXA3306 are fully-integrated vacuum pumps that are claimed to be easy to install and offer a small footprint. It features the latest-generation small power supply, which has been incorporated into the onboard controller first introduced with the STP-iXA2205 pump. It also includes a temperature management system option to minimize the formation of process-generated byproducts. The pump’s five-axis magnetic bearing system and new motor and drive system ensure long life and low operating costs with maintenance intervals as long as five years.

Applications

Fully-integrated vacuum pumps for Etch requirements.

Platform

The STP-iXA3306 offers industry-leading pumping performance. It has a maximum pumping speed of 3200 liters per second and improved throughput performance at high gas flows.

Availability

December 2010 onwards.
 

Read Next

August 4, 2025
Indian solar PV module manufacturer Vikram Solar will supply 250MW of n-type modules to Bondada Group for its solar project in Maharashtra.
Premium
August 4, 2025
Legislation withdrawing vital tax credits has plunged the US solar market into turmoil, putting project deployments and manufacturing at risk.
August 4, 2025
Brookfield Renewable earned more than US$400 million in FFO at its renewable generation assets in the second quarter of 2025.
Sponsored
August 4, 2025
Risen Energy’s Bob Hao discusses the company’s latest range of integrated energy solutions and recent developments in HJT module technology.
August 4, 2025
Waaree Energies has commissioned a 1.8GW solar module manufacturing line at its factory in Chikhli, Navsari district, Gujarat.
August 4, 2025
Spanish energy utility giant Iberdrola has sold its Mexican power business for US$4.2 billion, as part of its shift to focus on US and UK electricity transmission networks.

Subscribe to Newsletter

Upcoming Events

Media Partners, Solar Media Events
September 2, 2025
Mexico City, Mexico
Solar Media Events
September 16, 2025
Athens, Greece
Solar Media Events
September 30, 2025
Seattle, USA
Solar Media Events
October 1, 2025
London, UK
Solar Media Events
October 2, 2025
London,UK