ICP-PECVD tool from Singulus enables development of novel passivation layers for new cell concepts

Facebook
Twitter
LinkedIn
Reddit
Email

Singulus Technologies had launched the ‘SINGULAR ICP-PECVD’ platform for the development and production of high efficiency silicon solar cells, requiring passivation layers for R&D and production applications. The platform has been applied at research centers and institutes in Europe, America and Asia.

Problem

This article requires Premium SubscriptionBasic (FREE) Subscription

Unlock unlimited access for 12 whole months of distinctive global analysis

Photovoltaics International is now included.

  • Regular insight and analysis of the industry’s biggest developments
  • In-depth interviews with the industry’s leading figures
  • Unlimited digital access to the PV Tech Power journal catalogue
  • Unlimited digital access to the Photovoltaics International journal catalogue
  • Access to more than 1,000 technical papers
  • Discounts on Solar Media’s portfolio of events, in-person and virtual

Or continue reading this article for free

To reduce the costs of PV electricity, continuous improvements with respect to efficiency and manufacturing cost of PV cells and modules are necessary.

Solution

SINGULAR is an ICP-PECVD coating tool for crystalline silicon solar cells which is used for the mass production of silicon solar cells. The tool is based on static in-line production, which combines the advantages of in-line substrate transport and static processing. It allows the coating of complex layer systems, such as layer stacks or gradients consisting of different materials. The process variability, the small tool footprint and high reliability are said to be required for high cell efficiencies, while providing improved total cost of ownership and high uptime. The key feature of the machine is the ICP–PECVD technology. The inductively coupled plasma (ICP) excitation allows ideal control of film composition and density at high deposition rates.

Applications

Crystalline solar cell passivation layers for R&D and volume production.

Platform

The system is of a modular design, consisting of several vacuum chambers which can be customized. Due to this high flexibility, new manufacturing processes for cell efficiencies above 20% can be developed on a manufacturing platform. This is intended to guarantee a fast and easy transfer to production.

Availability

September 2011 onwards.

Read Next

July 2, 2025
Indigenous-led renewable energy company Yindjibarndi Energy Corporation (YEC) has submitted plans for a hybrid wind and solar PV renewable energy project to the Australian government’s Environment Protection and Biodiversity Conservation (EPBC) Act.
July 2, 2025
Robotics company Luminous has received AU$4.9 million (US$3.2 million) via Australia’s Solar ScaleUp Challenge to support deploying its ‘LUMI’ technology at utility-scale solar PV power plants.
July 1, 2025
Spanish independent power producer (IPP) Zelestra has secured financing and reached financial close for its 220MW solar-plus-storage plant in Chile.
July 1, 2025
Independent power producer (IPP) Arevon Energy has closed a US$600 million credit facility to support its solar PV and energy storage portfolio in the US.
July 1, 2025
The UK government has released this week (30 June) its Solar Roadmap, which sets out practical measures to meet the country’s solar PV targets.
July 1, 2025
Solar developer ib vogt has sold a 110MW solar PV plant in Spain to international fund NextPower V ESG, which is operated by investment firm NextEnergy Capital (NEC).

Subscribe to Newsletter

Upcoming Events

Media Partners, Solar Media Events
July 2, 2025
Bangkok, Thailand
Media Partners, Solar Media Events
September 2, 2025
Mexico City, Mexico
Solar Media Events
September 16, 2025
Athens, Greece
Solar Media Events
September 22, 2025
Bilbao, Spain
Solar Media Events
September 30, 2025
Seattle, USA