Specialist PV equipment manufacturer, Intevac has won its first production tool order for its continuous flux ion source ‘ENERGi’ system from an unidentified Asia-based solar cell manufacturer.
The company said that the purchase order was a result of a successful evaluation process, typically employed with ion implant tools.
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The ENERGi system is claimed to offer improved performance over conventional POCI3 diffusion techniques by providing full amorphization that boost light response and simpler annealing by using solid phase epitaxial re-growth for better emitter formation.
The company claims a wafer throughput for the ENERGi system of 2400 wafers per hour for both P and N-type wafers.
“This first production order is a result of the successful completion of the initial phase of an evaluation agreement we have with a large Asian cell manufacturer,” noted Chris Smith, executive vice president and general manager at Intevac Inc.
The company said that it expected to ship the system in the first quarter of 2013.
