PV equipment specialist SoLayTec, recently acquired by Amtech Systems has secured an evaluation testing period for its ALD (atomic layer deposition) system with Hanwha Q CELLS.
SoLayTec noted that it’s ‘InPassion’ ALD system would be evaluated by Hanwha Q CELLS at its advanced technology facility at its headquarters in Thalheim, Germany for high efficiency solar cell concepts.
“Our goal is to show the solar community that the spatial ALD solution for the passivation of c-Si cells has a higher potential compared to PECVD AlOx,” noted Roger Görtzen, co-founder of SoLayTec. “The biggest advantages of our spatial ALD tool compared to PECVD are a better step coverage, a stable uniformity and a layer thickness requirement of only 5nm Al2O3. Furthermore, if in the ALD cell process flow a direct PECVD is used for the SiN capping layer an integrated annealing process can be implemented, resulting in better cell performance compared to PECVD AlOx,” added Görtzen.
SoLayTec’s ALD technology has already been selected and purchased by US-based Mission Solar for N-type monocrystalline bifacial solar cell production, which is expected to enter volume production later in 2015.
Görtzen also noted that the company had been in talks with Hanwha Q CELLS for several years before an evaluation deal was struck.
Hanwha Q CELLS is itself being merged into Hanwha SolarOne but is expected to remain the driver of advanced technology within the larger entity.