New Product: Semilab SSM’s SRP metrology system provides density and resistivity depth profiling

Facebook
Twitter
LinkedIn
Reddit
Email

Product Briefing Outline: Semilab SSM, a division of Semilab, has launched its newest member to the ‘NanoSRP’ family of metrology products. Designed for small and mid-tier sized semiconductor and solar cell manufacturers, the SRP Express 170 is a manual system that provides density and resistivity depth profiling using spreading resistance profiling technology (SRP).

Problem: To date, small and mid-tier companies have had to choose between high-end, high throughput systems designed to support multiple samples at a time or at least ten years old obsolete low-end manual systems. These old systems are DOS based, which younger operators are often no longer familiar with, and the PC hardware is prone to fail. The wear out of the complex pneumatic motion control often makes micro resolution probing unattainable. Moreover, spare parts are becoming increasingly difficult to source. High end systems don’t have these issues, but their price isn’t justifiable when only a small number of samples need to be measured per day.

Solution: With the SRP-Express 170 system manufacturers can replace their aging, manual systems or outsourced services to bring a cost-effective modern spreading resistance profiling system in house. The SRP-Express 170 features a modern touch screen based Windows computer interface, which provides a user friendly, time efficient operation and analysis platform. A vision system that incorporates an electronic camera makes operation faster and acquisitions of images possible. The use of a modern piezo drive allows for a very smooth operation with higher resolution and flexibility. SRP is one of the oldest, best understood, and established electrical measurement technique in the semiconductor industry. This technology provides a direct measurement of the resistivity and carrier density profiles of electrically active dopants – the same electrical properties that determine device performance. The carrier density is obtained in cross section of a single layer or an entire device. There are no practical limits on carrier density range, conductivity, or structure thickness. It is primarily used for process development and control in all Silicon processing steps from substrate through the doping of poly gates. Because it provides complete electronic information it is often used for investigative purpose.

Applications: SRP is used whenever an electronic semiconductor structure needs to be profiled. This could be to tune and control diffusion. In epi growth SRP is used to check on autodoping, outdiffusion, hydrogen annealing, and reactor problems like temperature instabilities. After ion-implantation SRP controls dose, depth, and sheet rho, and allows for transistor threshold adjustments. SRP can verify Silane or dopant gas cleanliness to avoid massive production scrap. The photovoltaic industry uses SRP for diffusion profiling, where diffusion depth is a critical parameter for cell efficiency.

Platform: The SRP Express 170 will be priced between $200,000-300,000 depending on system configuration and options. The probing setup is integrated into a light tight cabinet, with integrated electromagnetic, vibration and acoustic isolation. Automatic bevel angel measurement (BAM) is available as an option. This option allows for better depth accuracy. Semilab SSM provides all necessary sample preparation tools in an optional kit.

Availability: Currently available.

23 August 2022
Intersolar South America, South America’s largest exhibition and conference for the solar industry, takes place at the Expo Center Norte in São Paulo, Brazil, on August 23–25, 2022, and has a focus on the areas of photovoltaics, PV production and solar thermal technologies. At the accompanying Intersolar South America Conference, renowned experts shed light on hot topics in the solar industry. In 2021 – despite the Covid-19 pandemic – Intersolar South America welcomed more than 28,000 visitors and over 1,000 conference attendees over 3 days. 200+ providers showcased their products. Combining local and international expertise, Intersolar South America brings together the PV and solar thermal sector to discuss the current status and strategic trends for Latin American PV markets, as well as technology innovations and new business opportunities. Overall, distributed generation is still driving momentum in the Brazilian market. Get 10% off with code 38LCF6KN
6 September 2022
Intersolar Mexico sits at the cross-section of photovoltaics, solar heating & cooling technologies, and energy storage. The event serves as the industry’s go-to source for invaluable technology trends and premier B2B contacts in the promising Mexican solar market. From September 6–8, 2022 Intersolar Mexico together with the co-located The GREEN Expo® and Aquatech Mexico will take place in Centro Citibanamex, Mexico City.
7 September 2022
The demand for rooftop solar PV is soaring, driven by falling costs of the technology against energy crises that are gripping countries globally. But while an increasing number of households turn to solar to generate their own electricity, there is now a need for more specialist equipment, technologies and services to ensure the solar transition can reach as many customers as possible. Delivering these is now a major challenge for rooftop solar installers. This webinar will analyse the characteristics of the rooftop solar market, discussing how the products, logistics, installation and servicing of solar systems has evolved in line with consumer demands.
14 September 2022
Join us in London for 2 days as we look at the UK’s new landscape for utility & rooftop solar. Understand the new opportunities within this GW-plus annual market!
15 September 2022
Bifacial PV modules will be the dominant solar PV technology globally within one or two years; in the utility-scale sector, their market share is already above 70%. This webinar will provide a clear view on the successful implementation of bifacial technology, maximizing system performance and minimising LCoE.
19 September 2022
RE+ 2022 is the umbrella event that includes SPI, ESI, RE+ Power, and RE+ Infrastructure. As North America's largest renewable energy event, it's a catalyst for industry innovation that's supercharging business growth in the clean energy economy.

Read Next

August 16, 2022
Chinese module manufacturer Risen Energy’s Hyper-ion module series has been tested and certified by German testing company TÜV SÜD.
August 16, 2022
US residential solar installer Sunnova plans to offer a US$425 million private placement of convertible senior notes due in 2028, to pay off debts and fund operating costs.
August 16, 2022
LevelTen Energy, a US firm that has developed a platform for renewable energy asset transactions, has launched new software that provides power purchase agreement (PPA) price data.
August 16, 2022
US solar product manufacturer Shoals Technologies Group saw record revenue and gross profit in the second quarter of 2022 due to strong demand for its combine-as-you-go system and a large number of new customers buying up components.
August 16, 2022
Australia’s Northern Territory has struck a deal with French energy major Total Eren to develop a 1GW green hydrogen project in the city of Darwin that will be powered by 2GW of solar PV.
August 16, 2022
Heterojunction cell and module producer Meyer Burger has secured European-made silicon wafers through a new supply agreement with Norwegian Crystals.

Subscribe to Newsletter

Upcoming Events

Upcoming Webinars
September 7, 2022
15:30 AEST (UTC +10)
Solar Media Events
September 14, 2022
London
Solar Media Events
October 4, 2022
New York, USA
Solar Media Events
October 11, 2022
Virtual event