Atomic layer deposition (ALD) equipment specialist SoLayTec, a subsidiary of Amtech Systems has shipped its solar cell ALD tool to a customer based in Asia.
ALD technology is typically used to deposit a thin, uniform amorphous aluminum oxide (Al2O3) layer as the rear side passivation for high-efficiency PERC (Passivated Emitter Rear Cell) technology.
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Fokko Pentinga, CEO and President of Amtech, commented, “For this project we are delivering the equipment for the PERC line upgrade and assisting the customer with the PERC ramp-up and line integration. PV manufacturers are experiencing extreme price pressure, resulting in an increasing need for higher cell quality with narrow cell efficiency distribution. The highest line yield possible of A-grade cells is essential to ensure good margins for these advanced production lines. Al2O3 wrap-around during deposition will result in reduction of the cell efficiency by as much as 0.2%, as well as front side color variations. Our ALD equipment addresses PV manufacturers’ challenges, by delivering the highest PERC cell efficiency using Al2O3, highest A-grade cells, and stable deposition process without any wrap around. Another challenge we address for A-grade cells is scratch free manufacturing of SiNx deposition for rear-side capping and front-side ARC. Our scratch free solution using our direct-plasma PECVD equipment is gaining momentum, with shipments and order backlog totaling more than 1GW.”
Amtech reported last month that its solar order backlog stood at US$39.3 million at the end of its first quarter of fiscal 2018, down from US$81.4 million in the previous quarter as well as a decline in new orders as it generated higher revenue recognition on tool shipments from its backlog.