The first Applied Materials ‘SunFab’ thin film customer to switch to tandem junction silicon cell structures, Sunfilm has also integrated three ‘Sensic’ in-line metrology tools from Basler Vision Technologies to provide required quality inspection throughout the process flow. Basler is best known for inspection systems used in the LCD industry. The systems have now been adapted and optimized for the thin-film industry.
“Sunfilm is again demonstrating its technological edge and commitment to constant innovation and latest state-of-the-art process control with the implementation of this new generation of inspection tools, developed together with Basler,” commented Dr. Wilhelm Stein, Chief Engineer at Sunfilm.
The inspection tools are used for incoming glass inspection, as well as for checking post deposition coatings after CVD processing and the final product inspection after the lamination process is finished.